A self-ion assisted beam (SIAB) source based upon unvala electron beam scheme
Won-Kook Choi, Jae-Hoon Song, Ki-Hwan Kim, Choong-Man Lee, Sung-Chang Choi, Jong-Han Song, Hyung-Jin JungVolume:
354
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(99)00412-5
File:
PDF, 120 KB
english, 1999