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Statistical evaluation of refractive index, growth rate, hardness and Young's modulus of aluminium oxynitride films
Sabine Dreer, Robert Krismer, Peter Wilhartitz, Gernot FriedbacherVolume:
354
Year:
1999
Language:
english
Pages:
7
DOI:
10.1016/s0040-6090(99)00564-7
File:
PDF, 147 KB
english, 1999