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Low temperature ZrB2 remote plasma enhanced chemical vapor deposition
J.F. Pierson, T. Belmonte, T. Czerwiec, D. Hertz, H. MichelVolume:
359
Year:
2000
Language:
english
Pages:
9
DOI:
10.1016/s0040-6090(99)00721-x
File:
PDF, 603 KB
english, 2000