Multiple scale integrated modeling of deposition processes

Thin Solid Films 2000 Vol. 365; Iss. 2

Multiple scale integrated modeling of deposition processes

Tushar P Merchant, Matthias K Gobbert, Timothy S Cale, Leonard J Borucki
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Volume:
365
Year:
2000
Language:
english
Pages:
8
DOI:
10.1016/s0040-6090(99)01055-x
File:
PDF, 288 KB
english, 2000
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