Microstructure of indium oxide films in oxygen ion-assisted deposition
Jun-Sik Cho, Ki Hyun Yoon, Seok-Keun KohVolume:
368
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(99)01107-4
File:
PDF, 450 KB
english, 2000