High performance 100 mm-in-diameter true zero-order...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 2005 Vol. 23; Iss. 6

High performance 100 mm-in-diameter true zero-order waveplates fabricated by imprint lithography

Wang, Jian Jim, Deng, Xuegong, Liu, Feng, Chen, Lei, Nikolov, Anguel, Liu, Xiaoming, Deng, Jiandong, Sciortino, Paul
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Volume:
23
Year:
2005
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.2062430
File:
PDF, 822 KB
english, 2005
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