SPIE Proceedings [SPIE Optics & Photonics 2005 - San Diego, CA (Sunday 31 July 2005)] Nanoengineering: Fabrication, Properties, Optics, and Devices II - Integrated nano-optic devices based on immersion nano-gratings made by imprint lithography and nano-trench-filling technology
Wang, Jian, Deng, Xuegong, Sciortino, Paul, Varghese, Ron, Nikolov, Anguel, Liu, Feng, Liu, Xiaoming, Chen, Lei, Dobisz, Elizabeth A., Eldada, Louay A.Volume:
5931
Year:
2005
Language:
english
DOI:
10.1117/12.615951
File:
PDF, 933 KB
english, 2005