Surface Roughness Influence on O2 and Ar RIE Gas Treated Aluminum Surface
Sauli, Zaliman, Retnasamy, Vithyacharan, Hashim, Uda, Taniselass, Steven, Palianysamy, Moganraj, Ayub, Ramzan MatVolume:
925
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.925.92
Date:
April, 2014
File:
PDF, 357 KB
english, 2014