The Mechanism of Defects Formation in Silicon Substrates

Solid State Phenomena 2010 / 6 Vol. 165

The Mechanism of Defects Formation in Silicon Substrates

Bogorosh, A., Voronov, S., Višniakov, N., Ščekaturovienė, D., Bubulis, Algimantas
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Volume:
165
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.165.7
Date:
June, 2010
File:
PDF, 417 KB
english, 2010
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