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Etching of glass microchips with supercritical water
Karásek, Pavel, Grym, Jakub, Roth, Michal, Planeta, Josef, Foret, FrantišekVolume:
15
Year:
2015
Language:
english
Journal:
Lab Chip
DOI:
10.1039/c4lc00843j
File:
PDF, 4.42 MB
english, 2015