Fabrication of Pb(Zr,Ti)O 3...

Integrated Ferroelectrics 2004 / 01 Vol. 68; Iss. 1

Fabrication of Pb(Zr,Ti)O 3 Thin Films by Liquid Delivery MOCVD Using a Cocktail Source with Pb(DPM) 2 , Zr(MMP) 4 and Ti(MMP) 4

OTANI, YOHEI, NAKAMURA, KIMITOSHI, OKAMURA, SOICHIRO, SHIOSAKI, TADASHI
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Volume:
68
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580490895743
Date:
January, 2004
File:
PDF, 2.14 MB
english, 2004
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