Low Temperature Deposited BST Thin Films for RF MEMS Switch

Low Temperature Deposited BST Thin Films for RF MEMS Switch

Laishram, Radhapiyari, Thakur, O. P., Bhattacharya, D. K., Harsh,, Goyal, Anshu, Sharma, Renu, Singh, Jagbir, Pal, Ramjay
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Volume:
116
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584587.2010.496617
Date:
November, 2010
File:
PDF, 594 KB
english, 2010
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