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Controlling the quality of thin films by surface acoustic waves
D. Schneider, T. Schwarz, A.S. Bradford, Q. Shan, R.J. DewhurstVolume:
35
Year:
1997
Language:
english
Pages:
12
DOI:
10.1016/s0041-624x(97)00020-6
File:
PDF, 1.11 MB
english, 1997