Micromachined ultrasound transducers with improved coupling...

Ultrasonics 2000 Vol. 38; Iss. 1-8

Micromachined ultrasound transducers with improved coupling factors from a CMOS compatible process

Peter C Eccardt, Kurt Niederer
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Volume:
38
Year:
2000
Language:
english
Pages:
7
DOI:
10.1016/s0041-624x(99)00085-2
File:
PDF, 520 KB
english, 2000
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