Assessment of the adhesion quality of fusion-welded silicon...

Ultrasonics 2000 Vol. 38; Iss. 1-8

Assessment of the adhesion quality of fusion-welded silicon wafers with nonlinear ultrasound

A. Wegner, A. Koka, K. Janser, U. Netzelmann, S. Hirsekorn, W. Arnold
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Volume:
38
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0041-624x(99)00096-7
File:
PDF, 354 KB
english, 2000
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