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Features of sputtering of nitrides with various component mass ratios
A.A Promokhov, A.S Mosunov, S.S Elovikov, V.E YurasovaVolume:
56
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0042-207x(00)00123-8
File:
PDF, 231 KB
english, 2000