Modification of magnetron-sputtered a-Si1−xCx:H films by implantation of Sn+ and Ge+
D. Dimova-MalinovskaVolume:
58
Year:
2000
Language:
english
Pages:
12
DOI:
10.1016/s0042-207x(00)00167-6
File:
PDF, 336 KB
english, 2000