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Dry etching of carbon layers in various etch gases
Š Haščı́k, P Hrkút, I Kostič, A Konečnı́kováVolume:
58
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0042-207x(00)00202-5
File:
PDF, 469 KB
english, 2000