Bulk and Surface Thermoelastic Dissipation in...

Journal of Microelectromechanical Systems 2015 / 4 Vol. 24; Iss. 2

Bulk and Surface Thermoelastic Dissipation in Micro-Hemispherical Shell Resonators

Sorenson, Logan, Shao, Peng, Ayazi, Farrokh
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Volume:
24
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2014.2333528
Date:
April, 2015
File:
PDF, 5.77 MB
english, 2015
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