An ultrahigh vacuum chemical vapor deposition system and its application to growth of nMOSFET and HBT structures
Guangli Luo, Peiyu Zhu, Peiyi Chen, Zhinong Liu, Huiwang Lin, Peixin QianVolume:
59
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0042-207x(00)00402-4
File:
PDF, 204 KB
english, 2000