Nitridation of vanadium in molecular nitrogen: a comparison...

Vacuum 2001 Vol. 61; Iss. 2-4

Nitridation of vanadium in molecular nitrogen: a comparison of rapid thermal processing (RTP) and conventional furnace annealing

I Galesic, U Reusch, C Angelkort, H Lewalter, A Berendes, E Schweda, B.O Kolbesen
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Volume:
61
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0042-207x(01)00152-x
File:
PDF, 163 KB
english, 2001
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