Activation of Si implanted in GaAs at high intensity As co-implantation
A.N Akimov, L.A Vlasukova, Yu.A Bumai, K.S GorupaVolume:
63
Year:
2001
Language:
english
Pages:
4
DOI:
10.1016/s0042-207x(01)00227-5
File:
PDF, 78 KB
english, 2001