Using of the high-grade layered structures for the...

Vacuum 2001 Vol. 63; Iss. 4

Using of the high-grade layered structures for the demonstration of the depth resolution of the RBS method

A.P Kobzev, E.A Kravtcov, L.N Romashev, A.V Semerikov, V.V Ustinov
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Volume:
63
Year:
2001
Language:
english
Pages:
5
DOI:
10.1016/s0042-207x(01)00229-9
File:
PDF, 131 KB
english, 2001
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