Hundred MeV heavy ion irradiation effect on boron diffusion in Si
V.A. Skuratov, N. Dinu, I.V. Antonova, V.I. ObodnikovVolume:
63
Year:
2001
Language:
english
Pages:
5
DOI:
10.1016/s0042-207x(01)00241-x
File:
PDF, 153 KB
english, 2001