Tribological and surface characterisation in UHV of...

Vacuum 2002 Vol. 64; Iss. 3-4

Tribological and surface characterisation in UHV of amorphous CNx films

J.C Sánchez-López, C Donnet, T Le Mogne
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Volume:
64
Year:
2002
Language:
english
Pages:
8
DOI:
10.1016/s0042-207x(01)00310-4
File:
PDF, 346 KB
english, 2002
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