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Chemical Stability of Titania and Alumina Thin Films Formed by Atomic Layer Deposition
Correa, Gabriela C., Bao, Bo, Strandwitz, Nicholas C.Volume:
7
Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/acsami.5b03278
Date:
July, 2015
File:
PDF, 5.81 MB
english, 2015