Compositional characterization of silicon nitride thin...

Vacuum 2002 Vol. 67; Iss. 3-4

Compositional characterization of silicon nitride thin films prepared by RF-sputtering

M Vila, J.A Martı́n-Gago, A Muñoz-Martı́n, C Prieto, P Miranzo, M.I Osendi, J Garcı́a-López, M.A Respaldiza
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Volume:
67
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0042-207x(02)00221-x
File:
PDF, 428 KB
english, 2002
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