Variation of the electron energy distribution with He...

Variation of the electron energy distribution with He dilution in an inductively coupled argon discharge

Lee, Hyo-Chang, Chung, Chin-Wook
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Volume:
19
Year:
2012
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.3701568
File:
PDF, 844 KB
english, 2012
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