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Online tuning of impedance matching circuit for long pulse inductively coupled plasma source operation—An alternate approach
Sudhir, Dass, Bandyopadhyay, M., Kraus, W., Gahlaut, A., Bansal, G., Chakraborty, A.Volume:
85
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4863098
Date:
January, 2014
File:
PDF, 1.22 MB
english, 2014