Influence of nitrogen concentration on conductivity of N-doped a-SiC:H films deposited by PECVD
J Huran, I Hotovỳ, A.P Kobzev, N.I BalalykinVolume:
67
Year:
2002
Language:
english
Pages:
4
DOI:
10.1016/s0042-207x(02)00249-x
File:
PDF, 132 KB
english, 2002