Investigation of the pulsed magnetron discharge by time-...

Vacuum 2002 Vol. 68; Iss. 2

Investigation of the pulsed magnetron discharge by time- and energy-resolved mass spectrometry

Martin Mišina, James W Bradley, Hermann Bäcker, Yolanda Aranda-Gonzalvo, Shantanu K Karkari, Don Forder
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Volume:
68
Year:
2002
Language:
english
Pages:
11
DOI:
10.1016/s0042-207x(02)00380-9
File:
PDF, 511 KB
english, 2002
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