Investigation of ion irradiation effects in a-SiXC1−X:H...

Investigation of ion irradiation effects in a-SiXC1−X:H thin films

A Grigonis, M Šilinskas, V Kopustinskas
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Volume:
68
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0042-207x(02)00454-2
File:
PDF, 99 KB
english, 2002
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