Investigation of ion irradiation effects in a-SiXC1−X:H thin films
A Grigonis, M Šilinskas, V KopustinskasVolume:
68
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0042-207x(02)00454-2
File:
PDF, 99 KB
english, 2002