Adjustment of electron temperature in ECR microwave plasma
Ru-Juan Zhan, Xiaohui Wen, Xiaodong Zhu, Aidi zhaoVolume:
70
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0042-207x(02)00617-6
File:
PDF, 113 KB
english, 2003