Conductivity of nanometer TiO2 thin films by magnetron...

Vacuum 2003 Vol. 70; Iss. 1

Conductivity of nanometer TiO2 thin films by magnetron sputtering

Guang-rui Gu, Zhi He, Yan-chun Tao, Ying-ai Li, Jun-jie Li, Hong Yin, Wei-qin Li, Yong-nian Zhao
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Volume:
70
Year:
2003
Language:
english
Pages:
4
DOI:
10.1016/s0042-207x(02)00618-8
File:
PDF, 140 KB
english, 2003
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