Structural and optical properties modification of a-SiC:H by Ga+ ion implantation
T Tsvetkova, O Angelov, M Sendova-Vassileva, D Dimova-Malinovska, L Bischoff, G.J Adriaenssens, W Grudzinski, J ZukVolume:
70
Year:
2003
Language:
english
Pages:
4
DOI:
10.1016/s0042-207x(02)00623-1
File:
PDF, 103 KB
english, 2003