Nanoscale lithography via electron beam induced deposition

Nanoscale lithography via electron beam induced deposition

Guan, Yingfeng, Fowlkes, Jason D, Retterer, Scott T, Simpson, Michael L, Rack, Philip D
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Volume:
19
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/19/50/505302
Date:
December, 2008
File:
PDF, 593 KB
english, 2008
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