Modification of zirconium oxide film microstructure during...

Vacuum 2003 Vol. 72; Iss. 2

Modification of zirconium oxide film microstructure during post-deposition annealing

J. Ciosek, W. Paszkowicz, P. Pankowski, J. Firak, U. Stanislawek, Z. Patron
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Volume:
72
Year:
2003
Language:
english
Pages:
7
DOI:
10.1016/s0042-207x(03)00111-8
File:
PDF, 314 KB
english, 2003
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