Double-anchoring fluorinated molecules for antiadhesion mold treatment in UV nanoimprint lithography
M. Zelsmann, D. Truffier-boutry, A. Francone, C. Alleaume, I. Kurt, A. Beaurain, B. Pelissier, B. Pépin-donat, C. Lombard, J. BousseyYear:
2009
Language:
english
DOI:
10.1116/1.3245993
File:
PDF, 677 KB
english, 2009