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SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] MOEMS Display and Imaging Systems III - Actively controlled diffraction grating interferometer MEMS devices
Kim, Byungki, Schmittdiel, Michael C., Degertekin, F. L., Kurfess, Thomas R., Urey, Hakan, Dickensheets, David L.Volume:
5721
Year:
2005
Language:
english
DOI:
10.1117/12.592215
File:
PDF, 913 KB
english, 2005