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SPIE Proceedings [SPIE SPIE Europe Optics + Optoelectronics - Prague, Czech Republic (Monday 20 April 2009)] Damage to VUV, EUV, and X-Ray Optics II - Applications of compact laser-driven EUV/XUV plasma sources
Barkusky, Frank, Bayer, Armin, Döring, Stefan, Flöter, Bernhard, Großmann, Peter, Peth, Christian, Reese, Michael, Mann, Klaus, Juha, Libor, Bajt, Saša, Sobierajski, RyszardVolume:
7361
Year:
2009
Language:
english
DOI:
10.1117/12.833645
File:
PDF, 1.45 MB
english, 2009