![](/img/cover-not-exists.png)
Surface and Interfacial Reaction Study of Half Cycle Atomic Layer Deposited Al$_{2}$O$_{3}$ on Chemically Treated InP Surfaces
Brennan, Barry, Dong, Hong, Zhernokletov, Dmitry, Kim, Jiyoung, Wallace, Robert M.Volume:
4
Language:
english
Journal:
Applied Physics Express
DOI:
10.1143/APEX.4.125701
Date:
November, 2011
File:
PDF, 366 KB
english, 2011