Three-Dimensional Nanostructure Fabrication by Controlling Downward Growth on Focused-Ion-Beam Chemical Vapor Deposition
Guo, Dengji, Kometani, Reo, Warisawa, Shin'ichi, Ishihara, SunaoVolume:
51
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.51.065001
Date:
May, 2012
File:
PDF, 1.29 MB
english, 2012