Crystallization Study by Transmission Electron Microscopy of SrTiO3 Thin Films Prepared by Plasma-Assisted ALD
Longo, V., Roozeboom, F., Kessels, W. M. M., Verheijen, M. A.Volume:
50
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/05013.0069ecst
Date:
March, 2013
File:
PDF, 459 KB
english, 2013