An AlN Sacrificial Buffer Layer Embedded into the InGaN...

Electrochemical and Solid-State Letters 2010 Vol. 13; Iss. 9

An AlN Sacrificial Buffer Layer Embedded into the InGaN Light Emitting Diodes for a Chemical Lateral Etching Process

Lin, Chia-Feng, Dai, Jing-Jie, Lin, Ming-Shiou, Chen, Chi-Chi
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Volume:
13
Year:
2010
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.3456532
File:
PDF, 431 KB
english, 2010
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