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ECS Transactions [ECS 220th ECS Meeting - Boston, MA (October 9 - October 14, 2011)] - Development of Novel Silicon Precursors for Low-Temperature CVD/ALD Processes
Iwanaga, Kohei, Tada, Ken-ichi, Chiba, Hirokazu, Yamamoto, Toshiki, Maniwa, Atsushi, Yotsuya, Tadahiro, Oshima, NoriakiYear:
2011
Language:
english
DOI:
10.1149/1.3633670
File:
PDF, 396 KB
english, 2011