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Physical Analysis of VO2 Films Grown by Atomic Layer Deposition and RF Magnetron Sputtering
Tangirala, M., Zhang, K., Nminibapiel, D., Pallem, V., Dussarrat, C., Cao, W., Adam, T. N., Johnson, C. S., Elsayed-Ali, H. E., Baumgart, H.Volume:
3
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.006406jss
Date:
April, 2014
File:
PDF, 819 KB
english, 2014