Note: A piezo tip/tilt platform: Structure, kinematics, and...

Note: A piezo tip/tilt platform: Structure, kinematics, and experiments

Du, Z., Su, Y., Yang, W., Dong, W.
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Volume:
85
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4870062
Date:
April, 2014
File:
PDF, 387 KB
english, 2014
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