Low-permittivity evaporated polymer-polyimide

Vacuum 1996 Vol. 47; Iss. 11

Low-permittivity evaporated polymer-polyimide

E Spassova, I Jivkov, G Danev, T Dimitrova, J Koprinarova, A Paskaleva
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Volume:
47
Year:
1996
Language:
english
Pages:
2
DOI:
10.1016/s0042-207x(96)00181-9
File:
PDF, 225 KB
english, 1996
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