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Dielectric properties of TiO2-films reactively sputtered from Ti in an RF magnetron
P Alexandrov, J Koprinarova, D TodorovVolume:
47
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/s0042-207x(96)00196-0
File:
PDF, 426 KB
english, 1996