Composite metal/C:H films prepared by unbalanced magnetron...

Vacuum 1996 Vol. 47; Iss. 12

Composite metal/C:H films prepared by unbalanced magnetron sputtering: Ni/C:H

H Biederman, P Hlídek, J Pešïčka, D Slavínská, V Stundžia, J Zemek, R.J. Kingdon, R.P. Howson
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Volume:
47
Year:
1996
Language:
english
Pages:
11
DOI:
10.1016/s0042-207x(96)00207-2
File:
PDF, 1.07 MB
english, 1996
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